LrgpV1, Main, Exploration, bibRecord, 002032

Microphotofabrication of very small objects : Pushing the limits of stereophotolithography

Identifieur interne : 002032 ( Main/Exploration ); précédent : 002031; suivant : 002033

Microphotofabrication of very small objects : Pushing the limits of stereophotolithography

Auteurs : M. Cabrera [France] ; A. Bertsch [France] ; J. Chassaing [France] ; J.-Y. Jezequel [France] ; J.-C. Andre [France]

Source :

Molecular crystals and liquid crystals science and technology. Section A, Molecular crystals and liquid crystals [ 1058-725X ] ; 1998.

RBID : Pascal:00-0443907

Descripteurs français

Pascal (Inist)
- Fabrication microélectronique, Photolithographie, Structure 3 dimensions, Photochimie, Polymérisation.
Wicri :
- topic : Photochimie.

English descriptors

KwdEn :
- Microelectronic fabrication, Photochemistry, Photolithography, Polymerization, Three dimensional structure.

Abstract

Stereophotolithography (SPL) allows to manufacture 3D polymer parts directly from Computer Aided Design data files. Its principle is the space resolved polymerization of a resin by a laser. We first discuss the possibilities to make parts with a very high resolution. A first approach was to push the classical SPL process to its limits to get a resolution of about 30 micrometres . A second really innovating one was to modulate the light flux by a liquid crystal display and we obtained a resolution of 5 micrometres. Since the use of these parts is limited by the nature of photopolymers, we also developed a new process to make complex polymer/metal parts directly. It consists in making the part layer by layer by using three techniques : SPL, electrodeposit of copper and laser silver plating.

Affiliations:

Links toward previous steps (curation, corpus...)

to stream PascalFrancis, to step Corpus: 000A52
to stream PascalFrancis, to step Curation: 000060
to stream PascalFrancis, to step Checkpoint: 000C37
to stream Main, to step Merge: 002448
to stream Main, to step Curation: 002032

Le document en format XML

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<front><div type="abstract" xml:lang="en">Stereophotolithography (SPL) allows to manufacture 3D polymer parts directly from Computer Aided Design data files. Its principle is the space resolved polymerization of a resin by a laser. We first discuss the possibilities to make parts with a very high resolution. A first approach was to push the classical SPL process to its limits to get a resolution of about 30 micrometres . A second really innovating one was to modulate the light flux by a liquid crystal display and we obtained a resolution of 5 micrometres. Since the use of these parts is limited by the nature of photopolymers, we also developed a new process to make complex polymer/metal parts directly. It consists in making the part layer by layer by using three techniques : SPL, electrodeposit of copper and laser silver plating.</div>
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Microphotofabrication of very small objects : Pushing the limits of stereophotolithography

Microphotofabrication of very small objects : Pushing the limits of stereophotolithography

Source :

Descripteurs français

English descriptors

Abstract

Links toward previous steps (curation, corpus...)

Le document en format XML

Pour manipuler ce document sous Unix (Dilib)

Pour mettre un lien sur cette page dans le réseau Wicri